Fault Detection and Classification System
Continuously reducing device, process margin, and high cost for substrate scrap in the semiconductor and FPD/LCD industries demand precise control of the equipment status and performance. With real-time fault-tolerant data collection, support for various single variable and multivariate analysis methods for fault detection and classification, and seamless integration to the EES framework, the PeakPerformance™ eFDC will allow you to control the equipment exactly the way you want to with ease.
In addition, the embedded workflow engine provided with the PeakPerformance™ Framework and eFDC will enable you to add customized business logics and custom analysis methods without system downtime. When you have the full control of your equipments, yield and productivity improvement is within your grasp.
eFDC provides the following functionalities:
Powerful Data Collection
- Graphical Virtual Parameter creation based on combination of multiple parameters
- Centralize data collection plan based on equipment model or individual equipment
- Collect data from different type of data sources
- Data sharing between all the EES applications
Fault Detection and Classification
- Support for various single variable and multivariate analysis methods
- Fault Detection in real-time and in batch process mode
- Ability to add new single variable and multivariate analysis methods
- Automatic adjustment to equipment condition change and slow drift effect
Data Summarization/Reporting/Archiving
- Lot, Recipe, substrate, step level summary data available
- Min, max, standard deviation, average, Cp, and Cpk summary data values
- Automatic Shift, Daily, Weekly, and Monthly summary data reporting in raw data and custom chart format
- Support for mixed data archiving schemes using database, file format, and compressed file format for raw data
- All types of summary data are stored in the database for easy access
Data Visualization
- Trend and summary chart with different lot/recipe/module/wafer/parameter combination
- Support for custom chart formats
- Easy drill down and drill up between EES data
- FAB Overview
- Lot and wafer level tracking
Miscellaneous Functions
- Graphical Equipment Fingerprinting
- Fault-Tolerant System
- Interdiction Manager for the entire EES
- Security features for Model and Configuration update
- SMS/Messenger/Mailing notification
- Wafer Process Quality Index for Metrology and Yield data correlation
- Data Quality Index for false fault detection rate reduction
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