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Process Automation Controller
 

pac (Process Automation Controller) is a powerful, highly configurable tool for equipment integration in the semiconductor field.

The pac is the implementation platform for equipment manager solutions. They display the connection between the production equipments and the MES level via the semiconductor-specific interface “SECS”. To provide the SECS-interface between pac and equipment, znt-Richter provides its SECS-driver product zsecs. This driver can be used as standalone solution or as integrated application together with the pac (see figure):

The pac is not only an interface component, but it also takes over a lot of tasks within the cell level:

  • Machine Management
    In the machine manager, the structure of the equipment can be described. The structured data can be defined either by means of GUIs or can be scanned via XML or ASCII formats. Using this, the specific equipment construction can be defined by configuration. The structured data are applied as a basis in all other managers.

  • Recipe Management
    The pac can manage locally structured recipes beside the recipe up-/download. The process engineer is empowered with a powerful tool for process optimisation at the local level.

  • Material Management
    The pac manages the process material and all process-durables.

  • Process Job Management
    The pac controls the production process and collects process data (Data Collection). The process job manager can execute superior controlling tasks and can integrate several tools via single SECS interfaces to a production cell.

  • Control Algorithm Management
    Advanced Process Control (APC): The pac implements the in the semiconductor needed complex, equipment-comprehensive rule algorithm (run-to-run control (R2R), feed forward, feed backward regulations) on process cell level. By means of the control algorithm manager, the process engineer can implement and test his own rule algorithm. Moreover, closed-loop control for process optimisation according to SPC rules can be realised.

  • FLS Management (Factory Level Systems)
    This is a generic integration component for the integration into the MES and MCS (Material Control System) environment.

  • Connection Management
    Controls the connection to all external interfaces such as data bases, SPC, FTP interfaces, TIBCO, ...

  • Test Management
    For application specific enhancements of the basic functions, a wide test environment is available. Via optimal test support, it is ensured that during process adaptation, any amendments or enhancements will not disrupt production.



pac standard functionalities can be enhanced via Java. These Java programs are derived from pac basic classes. The powerful object-oriented concepts of Java are available for the developer for expansion of current functionalities.  Complex control- and rule tasks can be implemented in pac, which normally can not be processed at the HW-oriented control level.