Situation
The access to detailed process and measuring data is of immense meaning for the stable operation of IC plants. With the administration of steadily growing complexity of operating processes, the avoidance of process variations or the reduction of shortfalls, a robust data base is indispensable in every case.
In order to receive this amount of data and information of independent equipments, the SEMI Equipment Data Acquisition (EDA) Standard, also known as “Interface-A” has been designed. It is based on the SEMI Standards Common Equipment Model (E120), Equipment Client Authentication and Authorization (E132), Equipment Self Description (E125) and Data Collection Management (E134). The common big problem that one faces during the realisation, is the very often missing Interface-A.
