Situation
The SECS interface (SEMI Equipment Communications Standard) has been established for years within the semiconductor industry as a standard for equipment-to-host communication. In an automated FAB the processing is controlled via this interface, measuring data are collected, recipes are chosen, etc.
zsecs Solution
The zsecs driver developed by znt-Richer, offers the ideal solution for this surface. The driver is 100% Java-based and can therefore be operated platform-independent. By writing of detailed logging files, a structured analysis of the history is possible without problems.
With the point-to-point communication protocol HSMS, zsecs is based on the semi standard E37. This standard represents a TCP / IP-Ethernet communication by which messages can be sent in an organised way by streams and functions (for example S1F1 – “Are you there”).
For complete equipment integration, the zsecs driver can simply be combined and operated together with the znt product pac. In this combination, you receive an effective SECS connection with little effort and the prompt possibility to characterise a SECS interface for example. Further equipment scenarios can be added quickly and easily via the pac framework.
