Substrate Map Management

MapSuite - a new, comprehensive solution for Substrate Map Management in semiconductor manufacturing

MapSuite - most advanced solution for Substrate Map Managemt

MapSuite provides a modern and comprehensive approach to substrate map management, addressing key challenges including yield optimization, process monitoring and control across all production stages, and multi-site equipment integration. Built on a state-of-the-art architecture and an intuitive, web-enabled user interface, MapSuite delivers targeted functionalities that enhance efficiency and precision.

Despite decades of standardization and automation, substrate map management remains a challenge in high-precision manufacturing, where traceability and process accuracy are critical. Governed by industry standards like SEMI E142, many manufacturers still rely on outdated legacy systems or custom-built solutions. More than just software, MapSuite is a comprehensive solution designed to address these challenges through a modern, fully integrated approach. It supports substrate traceability throughout the wafer lifecycle, enabling die-level data tracking – from initial processing to final testing and assembly.

Key Features of MapSuite Substrate Management

Supports various visualizations and map types

wafers, strips, trays, particle maps, metrology maps, parametric test results, various map standards

From foundry to wafer sort to assembly

supports substrate traceability throughout the wafer lifecycle
enabling die-level tracking – from initial processing
to final testing

Support for diverse substrate types (e.g.)

Silicon (Si)
Gallium Arsenide (GaAs),
Indium Phosphide (InP),
Silicon Carbide (SiC)
Gallium Nitride (GaN)

Map merging, stacking and splitting

overlay template maps
defective area analysis
split substrate maps,
minimizes waste
and maximizes
yield

Traceability of multi-die and multi-project wafers

multiple die types on a wafer
MPW Visualization

Manual editing of maps

single die editor
zone editing
edge editing
freehand editing

Real-time mapping and multi-site support

real-time visualization of substrate maps during testing, assembly etc.
establish repositories
at various locations to
store and access
substrate maps and
individual die information

Visual inspection classification

make inspection types visible / not visible
support the storage of visual inspection results

Key functionality of MapSuite Substrate Map Management

Visual Substrate Layout

Show visually the substrates in a web-browser, so the user has an overview of how production results look like.

Substrate Types

Many different substrates are supported, being it semiconductor or photonic wafers. Also lead- frames and trays are supported, or even single products. As well as waffle and gel packs can be used.

Substrate Editing

Substrates can be manually edit, when for example additional fail dies are found in a process, or when certain parts of a substrate should not be used for further processing.

Merge Substrate Maps

Merge production results of the substrate from different processes, having always updated substrates maps available.

Stack Substrate Maps

Stack bin results of a substrate map, to find common failures on certain positions of a wafer. For example, to judge which edge dies should have standard the status failed.

Visual Inspection

Store visual inspection results and have them available for an overlay with other production results, or merge the result with other substrate data.

Wafer Chipping and Scratches

Substrates like wafers are sensitive for chipping and scratches. This gives the need for the option to indicate where wafers are chipped or scratches.

Split Substrates

Sometimes wafers can break, but the products on the non-broken part will still work. Or a substrate needs to be split for different processes, like bars in the photonics world.

Transfer Maps

For high value, medical and automotive devices it is almost a must to have full traceability from the die on the wafer to the individual dies in an end product, a transfer map can help in this process.

Multi Project Wafer

With the increasing price and complexity of products, sample products are many times created using Multi Project Wafers. Those substrates are also supported.

Chiplets

Chiplets as well as a system in a package can be handled with MapSuite. Having different dies in one package next to each other, or stacked, it becomes all possible.

Assembly Process

For this process substrate maps can be used for assembly. Like an electronic map for the die attacher, or a coat and cleave plan for the photonics industry.

Particle Inspection

Over the years many file formats to contain the substrate information have been introduced. Basic of MapSuite is the E142 map, while supporting 50+ other formats. File conversion is therefore standard available.

Parametric Test Data

At test and assembly, it is sometimes desired to see a real time map of production, but the equipment is not capable of that, MapSuite can help here out as well.

Measurement Data

Many times production runs at different locations, with the Multi Site Option data can be exchanged between different locations within the company. But substrate maps can also be exchanged with subcontractor for example, and that two ways, receive and send.

File Formats

Real Time Maps

At test and assembly, it is sometimes desired to see a real time map of production, but the equipment is not capable of that, MapSuite can help here out as well.

Multi Site

MapSuite solves challenges in various Industries

Semiconductors

This is where it all started 20+ year ago, from inkless binning to electronic substrate maps. 1 or 1,000,000 parts on a wafer, MapSuite can do and has done it all.

Photonics

So far this has been a high-tech low volume market, but we see this growing like semiconductors. It has some additional requirements, MapSuite support those, like the layout for bars to name one.

Medical Glass Substrates The new medical industry uses those to analyze a patient’s fluids for example. For example, small canals are etched on the glass wafer for analyzing fluids, where there can be a set of individual substrates on one wafer.

Chiplets & System in a Package Those days more than one die can end up in a single packed device. MapSuite helps with tracing those dies coming from different substrates for example.

Flexible Substrates

Who doesn’t know the flexible PCBs that go into your camera. Those days even a cable harnass of a car can be made with a flexible substrate. As in production more than one substrate on a larger substrate goes through the factory, have a tool that can support those can become very useful.

Electronics – Resistors

Power resistors are made on so called ‘plates’ as being the substrate. A couple of 100 resistors can sit on such a plate, and those need to be singulated in the end an sorted. MapSuite can help to handle those substrates

Nano-Mechanical Parts

The semiconductor way of putting layers on a substrate, layer by layer, is something that is used to make nano-mechanical parts. For example, the small tools that make the gripper that can go into your blood vessels are made in this way. Layer by layer those small parts are create so they can make small mechanical structure that are able to ‘move’.

Wood/Acryl/Metal

Laser cutters and Engraving equipment can handle sheets with several parts at the same time. To control the quality of those sheets, MapSuite can be used to store those sheets as substrates, and make use of the solutions available, like editing the sheet to mark bad parts for example.

Track, store and handle any results from wafer and chip production processes

MapSuite - most advanced solution for Substrate Map Management